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W-357BM-1200 | Separate type High frequency Batch cleaning
[Ultrasonic Cleaners [ Semiconductor Industry ]]

Overview

High-frequency ultrasonic cleaner


Features

Digital control system enables stable oscillation.
Versatile interfaces enable control according to the cleaning equipment.

Usage
  • Cleaning for magnetic head
  • Cleaning for silicon wafer
  • Silicon wafer
  • Sapphire Wafer
  • Pre or Post process of semiconductor industry
  • Cleaning test in laboratories or other testing environment


Specification


Model No.W-357BM-1200
Oscillation mode
Single frequency oscillation
Rated output power 1200 W
Nominal oscillation frequency 1MHz
Power input 200-240 VAC, 50 / 60 Hz
 2400 VA
Display Vacuum fluorescent display (VFD), 16 characters x 2 lines
Interface Analog output contacts 4-20mA current output
Output
3 contacts : 
Alarm output
Oscillation detection output
Power ON output 
External drive input 2 contacts : 
Sensor input
Remote input 
RS-485 communication MODBUS (RTU) protocol *
Dimensions
(WxDxHmm)
360 x 360 x 143
(Including rubber feet) 
Weight 7kg
  • Variable output range : 200 to 1200 W
  • Power cable length : 3m  

    * : MODBUS is the registered trademark of Schneider Electric USA, Inc.
F type | Vibration plateBM-1200F
Model No.W-357BM-1200F
Generator model number W-357BM-1200
Maximum allowable input 1200 W
Nominal driven frequency 1MHz
Effective cleaning area 
(WxDmm)
272 x 154 
Dimensions (WxDxHmm) 355 x 245 x 68
Material Plate : SUS316L, Electropolished surface
Weight 7 kg
  • Liquid contact surface material :
    Vibration plate : SUS316L
  • Liquid temperature range : 5 to 80℃
  • Transducer : PZT
  • Transducer cable length : 5m x 2
S type | Tank typeW-357BM-1200S
Model No.W-357BM-1200S
Generator model number W-357BM-1200
Maximum allowable input 1200 W
Nominal oscillation frequency 1MHz
Effective cleaning area
(WxDmm)
135 x 160  2 locations
Dimensions
(WxDxHmm)
External 496 x 336 x 372
Inside tank 442 x 276 x 252
Material Tank : SUS316L, Electropolished surface
Basement of the tank : SUS304
Packing : Viton or PTFE
Drain valve 1/2"
Weight 18 kg
  • Liquid contact surface material :
    Vibration plate, Tank : SUS316L
    Packing : PTFE
    Drain : SUS304 
  • Liquid temperature range : 5 to 80℃
  • Transducer : PZT
  • Transducer cable length : 5m x 2

Upon request, transducer units can be manufactured with custom specifications, such as 2400W or 3600W input, or support for 6 inch, 8 inch, or 12 inch wafers.
Industrial Equipment TEL:81-532-41-2774