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HLF800 series | Ultrasonic Flow meter
[Measurement Equipment [ Flow meters ]]

Overview

Advanced signal processing with DSP (Digital Signal Processor) enables accurate and stable flow measurement

Utilizing ultrasonic wave transfer in liquid measures flow speed and accurate flow rate can be calculated.
A couple of ultrasonic sensors are located in the sensor unit and transfer speed btween them with liquid flow shows the speed. The flow speed represent the flow rate inside the tube of sensor unit.

○There is no part or construction inside the tube, so the least pressure loss is expected.
○Flow rate measurement range is wide from low to high.

Features

 ●Stable measurement by DSP (Digital Signal Processor) even with bubbly environment
bubble effect comparison

●Fitting two sensor unit to one main unit
Realizes good space factor and cost effectivity by controlling two sensors in one main unit. Different chemical, different size measurement is possible.
HLF800 series_sensor
●Good readability by VFD
VFD (Vacuum Fluorescent Display) gives very good readability in limited installation space (HLF820).
HLF820_display
●High temperature chemical resistant
All contacting surface to the measuring liquid is made by chemical resistant NEW PFA. Genuine sel-developed ceramics element realizes the use in high temperature liquid up to 200 deg C (K type).
picture_HLF800
●Detachable cable enables easy installation
Sensor cable can be detached from the sensor unit, so the installation of the sensor unit is easily done without cable. The cable length can be selected fro 5 or 7 meters. HLFS cable
●PC monitoring is possible by RS-485 communication
"HLF800 monitor" is supplied for PC monitoring. Install the software to Windows PC and it controls the parameter setting and monitors the measurement data via RS-485 communication. HLF800 monitor



Usage
  • Flow measurement of DIW or ultrapure water for the semiconductor manufacturing process
  • Flow control of high corrosive chemical liquid
  • Flow control of slurry liquid for CMP (Chemical Mechanical Polishing)


Specification

type name & spce

Specification

Converter

Model No.HLF810
HLF820
Measurement method Measuring propagation time difference between sending and receiving ultrasonic wave
Accuracy ±1% R.D.(DIW at 20℃) 
Data update cycle 0.01 sec.
power source Voltage 24 V DC ±10 % (21.6 - 26.4 V)
Power consumption 4 W 5 W
Display - Vacuum fluorescent display(VFD), 16 characters x2 lines
Digital input Open collector input no-voltage contact input, 2 points
Selectable from integrated value reset or zero-point adjustment
Output 4-20 mA current output 2 points
Resolution: 12bits (Max. load resistance 450Ω)
Digital output Open collector output (Max. 35 V/0.1 A), 2 points
Selectable from comparison, integrated pulse, instantaneous frequency, or error output
Interface RS-485 (MODBUS * protocol, RTU mode) 
Up to 32 converters can be concatenated (address setting : 1- 32) 
Baud rate: 9600, 19200, 38400, 57600 bps
Case material ABS
Ambient operating temperature 0 to 50℃ (No condensation)
Weight 130 g 230 g
Installation DIN rail Panel mount
 
* MODBUS is the registered trademark of Schneider Electric USA, Inc.
    
Sensor
Model No.HLFS01-04
HLFS01-06
Measurement target
Ultrapure water / Deionized water / Chemical liquid
Flow rate measurement range 
0 to 2L/min
0 to 6L/min
Connection tube size 1/4 inch 3/8 inch
Accuracy Measured flow rate 0 to less than 800mL/min 800 to 2000mL/min 0 to less than 2000mL/min 2000 to 6000mL/min
Accuracy ±8mL/min ±1% R.D. ±20mL/min ±1% R.D.
Max. operating pressure 0.5MPa (0 to 90℃) / 0.2MPa (90 to 200℃)
Max. fluid temperature Standard type 0 to 90℃
High temperature type 0 to 180℃ 0 to 200℃
Ambient operating temperature 0 to 80℃
Liquid contact surface material NEW PFA
Weight 90g 110g
Pressure loss factor  3.7863 0.0937

Model No.HLFS01-08 
HLFS01-12
Measurement target Ultrapure water / Deionized water / Chemical liquid
Flow rate measurement range  0 to 20L/min
0 to 50L/min
Connection tube size 1/2 inch 3/4 inch
Accuracy Measured flow rate 0 to less than 4.3L/min 4.3 to 20L/min 0 to less than 11.8L/min 11.8 to 50L/min
Accuracy ±43mL/min ±1% R.D. ±118mL/min ±1% R.D.
Max. operating pressure 0.5MPa (0 to 90℃) / 0.2MPa (90 to 200℃)
Max. fluid temperature Standard type 0 to 90℃
High temperature type 0 to 200℃
Ambient operating temperature 0 to 80℃
Liquid contact surface material NEW PFA
Weight 130g 160g
Pressure loss factor  0.1146 0.0138

Model No.HLFS01-16 
 Measurement target Ultrapure water / Deionized water / Chemical liquid
Flow rate measurement range   0 to 80L/min
 Connection tube size 1 inch
 Accuracy Measured flow rate  0 to less than 20L/min 20 to 80L/min
 Accuracy ±200mL/min ±1% R.D.
 Max. operating pressure 0.5MPa (0 to 60℃) / 0.2MPa (60 to 200℃)
Max. fluid temperature Standard type -
High temperature type 0 to 200℃
Ambient operating temperature 0 to 80℃
Liquid contact surface material NEW PFA
Weight 212g
Pressure loss factor  0.0033

 Pressure loss
⊿P=AQ2  
⊿P: Pressure loss[KPa] ,  A: Pressure loss factor (20℃ Pure water),  Q: Flow rate [L/min]

Connection cable between converter and sensor
ModelHLFS01 cable 5m
HLFS01 cable 7m
Material
ETFE
Length 5 m
7 m
Weight 150 g 210 g

Industrial Equipment TEL:81-532-41-2774