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Nozzle type cleaner "PULSE JET" point type
[Ultrasonic Cleaners [ Semiconductor Industry ]]

Overview

Features
Applying ultrasonic pressure to the water stream from the nozzle creates particle acceleration in the water and the water particle motion removes submicron contamination on the objective works.
Fresh DI water supply avoids re-contamination within the cleaning media.
Suitable for single wafer processing system.
High frequency ultrasound (megasonic) is effective for fine particle contamination.
Output power control can adjust the power and suitable for delicate object like magnetic head.


Lineup [Frequencies]
【400kHz】
W-357-P50: Combination with high power transducer for high power application

【1MHz】
W-357-1MPG: Power stabilized generator saves electric power consumption and reliable cleaning power.
*CE Compliance is possible

【1.5MHz】
W-357-1.5MPG: Higher frequency drive is useful for finer particle contamination. RS-422A communication is equipped.

【3MHz】
W-357-3MPG: Very high, 3 MHz system. For the finest semiconductor process.

400kHz


W-357P-50
W-357P-50

Larger cleaning area than other or traditional models.
Lower frequency(400kHz) and high output power enables strong cleaning power.
P.P material is used for the horn and avoids to generate metal ion.
Usage
Cleaning after mirror polishing or before vapor deposition of GaAs wafer
Cleaning of HDD media or Si wafers
Cleaning for CMP post process
■Generator
Model No.W-357P-50
Oscillation mode Single frequency oscillation
Rated output 100 W
Nominal oscillation  frequency 400kHz
Power input 100 VAC
50/60Hz 250 VA
Dimensions (WxDxHmm)
232 x 340 × 138 
Weight 6.0kg

●Output setting range: 0 to 100 % 
●Operating condition:
   Temperature : 5 to 40℃
   Humidity : 10 to 85%
●Rating of contact points for external drive : Ultrasonic oscillation control (on control side)
  Contact input : 24 VDC, 20mA or less
  Alarm output (Photocoupler output rating) : 24 VDC, 20 mA or less
■Include cables : Power cable(2m), Control cable(5m x 3)

■Nozzle
Flow rate 4L/min
Dimensions dia. 60x135 mm
Nozzle diameter dia. 8 mm
Weight 700g

●Liquid temperature range : 20 to 50℃
●Transducer: PZT
●Material : 
   Nozzle: Polypropylene
   Gasket: Silicon rubber
   Vibration plate: Tantalum
●Liquid contact surface material:
   Nozzle: Polypropylene
   Gasket: Silicon rubber
   Vibration plate: Tantalum
●Inlet: Specified tube (Outer dia. 13mm)
●Output cable: 5m

1MHz


W-357-1MPG
W-357-1MPG-E

Digital constant power generator. Keeping high cleaning power with low power consumption, thanks to the digital control.
Suitable to delicate cleaning such as magnetic head.
Outer diameter is only 25 mm and is easy for embedding to the existing semiconductor processing equipment.
Avoiding metal ion from horn by non-metal construction.
Capability of RS-422A interface and output power can be measured 4-20 mA current.

Generator
Model No.W-357-1MPG
Oscillation mode Single frequency oscillation
Rated output  40 W
Nominal oscillation frequency 1MHz
Power input 100-240 VAC, 50/60Hz, 300 VA
Dimensions (WxDxHmm) 180 ×250 ×100  
(including rubber feet)
Weight 2.2 kg

●Output setting range : 0 to 40W 
●Operating condition:
   Temperature : 5 to 40℃
   Humidity : 10 to 85 %
●Rating of contact points for external drive : Ultrasonic oscillation control (on control side)
  contact input : 24 VDC, 18 mA or more
  Alarm output (on the unit) : 24 VDC, 0.5A
■Included cables : Power cable (100V/2m or 200V/3m), Control cables (5m x 4)

■Nozzle
Flow rate 0.9 L/min
Dimensions dia. 25 x 80 mm
Nozzle diameter dia. 4 mm
Weight 300 g

●Liquid temperature range : 20 to 50℃
●Transducer : PZT
●Material : 
   Nozzle : PCTFE, PTFE
   Gasket : Perfluoroelastomer
   Vibration plate : Special ceramic
●Liquid contact surface material:
   Nozzle : PCTFE, PTFE
   Gasket : Perfluoroelastomer
   Vibration plate : Special ceramic
●Inlet : Compatible tube (Outer dia. 6 mm)
●Output cable length : 5 m

1.5MHz

W-357-1.5MPG
W-357-1.5MPG



High frequency, 1.5 MHz ultrasonic power removes finer particles.
RS-422A interface is equipped.


■Generator
Model No.W-357-1.5MPG
Oscillation mode Single frequency oscillation
Rated output 40 W
Nominal oscillation frequency 1.5MHz
Power input 100-240 VAC, 50/60Hz, 300 VA
Dimensions (WxDxHmm) 180 × 250 × 100 
(including rubber feet)
Weight 2.2 kg

●Output setting range: 0 to 40W
●Operating condition:
   Temperature : 5 to 40℃
   Humidity : 10 to 85 %
●Rating of contact points for external drive : Ultrasonic oscillation control (on control side)
  Control input : 12 VDC, 18 mA or more
  Alarm output : 24 VDC, 0.5 A
■Included cables : Power cable (100V/2m or 200V/3m), Control cables (5 m x 4)

■Nozzle
Flow rate 0.9 L/min
Dimensions 29 x 34 x 92 mm
Nozzle diameter dia. 4 mm
Weight 300 g

●Liquid temperature range : 20 to 50℃
●Transducer : PZT
●Material : 
   Nozzle : PCTFE, PTFE  
   Gasket : Perfluoroelastomer
   Vibration plate : Tantalum
●Liquid contact surface material :
   Nozzle : PCTFE, PTFE 
   Gasket : Perfluoroelastomer
   Vibration plate : Tantalum
●Inlet : Compatible tube (Outer dia. 6 mm)
●Output cable length : 5 m


3MHz

W-357-3MPG
W-357-3MPG

Highest frequency in the series cleans super fine particles, suppressing the damage to the work at minimum.

■Generator
Model No.W-357-3MPG
Oscillation mode  Single frequency oscillation
Rated output 40 W
Nominal oscillation frequency 3MHz
Power input 100-240 VAC, 50/60Hz, 300 VA
Dimensions (WxDxHmm) 180 × 250 × 100 
(including rubber feet)
Weight 2.2 kg

●Output setting range: 0 to 40 W
●Operating condition:
   Temperature : 5 to 40℃
   Humidity : 10 to 85%
●Rating of contact points for external drive : Ultrasonic oscillation control (on control side)
  Control input: 12 VDC, 18 mA or more
  Alarm output: 24 VDC, 0.5 A
■Included cables : Power cable (100V/2m or 200V/3m), Control cables (5 m x 4)

■Nozzle
Flow rate 0.9 L/min
Dimensions 29 x 34 x 92 mm
Nozzle size dia. 4mm
Weight 300 g

●Liquid temperature range : 20 to 50℃
●Transducer: PZT
●Material : 
   Nozzle : Special ceramic, PCTFE
   Gasket : Viton rubber, Silicon rubber
   Vibration plate : Special ceramic
●Liquid contact surface material:
   Nozzle : Special ceramic, PCTFE
   Gasket : Silicon rubber
   Vibration plate : Special ceramic
●Inlet: Compatible tube (Outer dia. 6 mm)
●Output cable length : 5 m

Industrial Equipment TEL:81-532-41-2774