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Quartz Transducer Cleaner
[Ultrasonic Cleaners [ Semiconductor Industry ]]

Quartz Head


The next generation of cleaning! High-performance, Low-damage.

石英振動体型

Honda Electronics introduced world-first quartz vibration type ultrasonic cleaning unit in 2006. 
Ultrasonic vibration is applied to the Quartz head and cleans semiconductor wafers.
This method realizes high purity cleanliness, because cleaning chemical has no contact except Quartz glass (no contact of rubber or something else for packing). It also saves cleaning chemical liquid compared to batch system or flushing type cleaners.
Quartz head (vibration unit) may be optionally modified to appropriate shape for different applications, such as  low damage cleaning, wide area cleaning, special object like beveled surface or notches. 
Product Video
Please also refer below video for the entire explanation of the product.

Overview


Features
Low damage cleaning for the wafers with micro-structure

■Ultrasonic vibration is applied to the Quartz head and cleans semiconductor wafers.
Cleaning chemical is filled between the quartz head and semiconductor wafer and the ultrasonic vibration can be carried via quartz head and cleaning chemical will effectively cleans the wafer with ultrasonic acceleration power.
■It cleans semiconductor wafers with low damage.
Using quartz glass for chemical contact points instead of rubber packing, there is no risk of elution or wearing out of packing material and keeps high level cleanliness.

Usage
Removal of photo resist material
Removal of polymer material after etching or ashing
Cleaning Gate electrode
Post process of CMP

Specification


■Generator
MODELW-357-1MQG
-SKC/SKH
W-357-2MQG
-SKC/SKH
W-357-3MQG
-SKC/SKH
Oscillation mode
Single frequency oscillation
Rated output 12W
Nominal oscillation frequecy 1MHz 2MHz
3MHz
Power input
100-240VAC  50/60Hz  300VA
Dimensions (WxDxHmm)
   185x265x100 (including rubber feet) 
Weight 2.2kg
Common for SKC series and SKH series
●Output setting range: 0-12W (Vibration unit is limited to 10 W continuously when air-purge is used)
●Ambient operating condition :
 Tmperature: 15-35℃
 Humidity: 10-85%
●Rating of external drive terminal: 
 Ultrasonic oscillation control input: 12 V DC, 16mA or more
 Alarm output: 24 V DC, 0.5 A
■Included cables: Power cable (100V type: 2m or 200V type :3m), control cables: 5mx4
■Vibration unit
SKC series
MODELW-357-1MQG
-SKC
W-357-2MQG
-SKC
W-357-3MQG
-SKC
Flow rate Not specified
Weight Approx. 600g
Cleaning area 24cm2 27cm2
Length Approx. 159 Approx. 169
Size of chuck dia.24 or 34
Liquid supply hole none

SKH series
MODELW-357-1MQB
-SKH
W-357-2MQB
-SKH
W-357-3MQB
-SKH
Flow rate Not specified
Weight Approx. 600g
Cleaning area 24cm2 27cm2
Length Approx. 159 Approx. 169
Size of chuck dia.24 or 34
Liquid supply hole

     Common for SKC series and SKH series
     ●Liquid temperature :20-50℃
     ●Transducer :PZT
     ●Material
        Transducer unit :Quartz glass
        Packing :Silicon rubber
        Case :PCTFE
     ●Liquid contact surface material :Quartz glass
     ●Cable length :Output cable 1.5m + extension cable 3.5m
     ●Air purge coupling :Compatible tube (Outer diameter: 6mm)
Industrial Equipment TEL:81-532-41-2774